> Where can I find resources on thermal coefficient of expansions and
Young's
> modulus for thin films?  In particular, PE Oxide, SOG, BPSG, PE SiN,
and
> thermal oxide.

One good reference is  Chen et. al., J. Vac. Sci. Technol. B 18(6),
Nov/Dec 2000, pp. 2826 - 2834

Cheers,

Greg Mattiussi
Spectalis Corp.