Dear Peng Jin,


I am replying to your question concerning your desire to work with a
negative resist that can easily be removed in a standard photoresist
stripper....My company, MicroChem Corp, manufactures a negative tone
photoresist called SU-8 which is widely used in the MEMS area but up
till now has had some issues related to the stripping, especially after
electroplating....We have recently developed a release layer that is
spin coated onto the seed layer/substrate and baked, then the SU-8 is
applied and processed as per normal...A very short development step is
then performed to develop out the release layer, in either O2 Plasma or
an aqueous developer such as Shipley MF319....The electroplating step
can then be performed followed by immersion in either a developing
solution (MF319) or a NMP based stripper such as Remover PG or Shipley's
1165 Remover which dissolves the release layer, leaving behind the
electroplated feature....

If you have any further questions or if you need additional information
including a sample please contact me at 617-965-5511 ext. 308 or via
email at [email protected]

Thanks and best regards,

Mark Shaw
Technical Sales & Applications Support
MicroChem Corp.



Hi, friends,

In my research project, I need to find a kind of negative photoresist
which
must be easy to remove by acetone or other chemical solvent. Could
anyone give
me some idea about it?

Thanks.

Peng Jin

-----Original Message-----
From: [email protected]
[mailto:[email protected]]
Sent: Tuesday, January 29, 2002 12:01 PM
To: [email protected]
Subject: mems-talk digest, Vol 1 #172 - 6 msgs


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Today's Topics:

   1. heating up metals (Yahong Yao)
   2. RE: Teflon foil. (Heiko van der Linden)
   3. Negative Photoresist (Peng Jin)
   4. Oil bath (harry .)
   5. EEPROM is sensor interface circuits. (li gang)
   6. Re: Negative Photoresist (Paolo Bondavalli)

--__--__--

Message: 1
From: "Yahong Yao" 
To: [email protected]
Date: Tue, 29 Jan 2002 04:53:53
Subject: [mems-talk] heating up metals
Reply-To: [email protected]

Hello All,

When metals are heated up, some change from solid to liquid then to
vapor
(for example, Au, Al, Ni...), and some change form solid to vapor
directly
(Cr).  I am wondering where I can find a list of such information for
commonly used metals.  Thanks a lot.

Yahong




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--__--__--

Message: 2
From: "Heiko van der Linden" 
To: 
Subject: RE: [mems-talk] Teflon foil.
Date: Tue, 29 Jan 2002 09:13:56 +0100
Organization: MESA+ Research Institute, Twente University
Reply-To: [email protected]

Hi Nathalia,

Thank you for your kind email. I have sent a message to durafilm to see
if they can supply me with the foil I need.

Regards,
Heiko van der Linden

*******************************
MESA+ Research Institute
      Twente University
         P.O. Box 217
     7500 AE Enschede
       The Netherlands
*******************************


-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Nathalia
Sent: Saturday, January 26, 2002 12:34 AM
To: [email protected]
Subject: [mems-talk] Teflon foil.


Hi Heiko,

depending on the teflon you're looking for, Durafilm might have it.
Write me an email if you need more info/their webpage.
([email protected]).

Regards,
Nathalia
http://transducers.stanford.edu
_______________________________________________
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Visit us at http://www.mems-exchange.org/

--__--__--

Message: 3
From: "Peng Jin" 
To: 
Date: Tue, 29 Jan 2002 10:33:58 -0000
Subject: [mems-talk] Negative Photoresist
Reply-To: [email protected]

Hi, friends,

In my research project, I need to find a kind of negative photoresist
which
must be easy to remove by acetone or other chemical solvent. Could
anyone give
me some idea about it?

Thanks.

Peng Jin

--__--__--

Message: 4
From: "harry ." 
To: [email protected]
Date: Tue, 29 Jan 2002 13:58:15 +0000
Subject: [mems-talk] Oil bath
Reply-To: [email protected]

Dear MEMS-members,

Does anyone know what company can manufacture an etching tank with the
circulated oil bath that can keep the solution temperature constant?
Thanks!

Regards,
harry



_________________________________________________________________
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http://photos.msn.com/support/worldwide.aspx

--__--__--

Message: 5
From: "li gang" 
To: [email protected]
Date: Tue, 29 Jan 2002 22:11:34 +0800
Subject: [mems-talk] EEPROM is sensor interface circuits.
Reply-To: [email protected]

Dear all,

I readed some papers about sensor interface circuits, and found
that EEPROM is widely used in them. Could you recommand some
papers and books, which state the EEPROM's function in sensor
interface circuits in depth?

Thanks in advace,

Sincerely,

Li Gang


_________________________________________________________________
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http://explorer.msn.com/intl.asp.

--__--__--

Message: 6
Date: Tue, 29 Jan 2002 16:08:19 +0100
From: Paolo Bondavalli 
Organization: THALES LCR
To: [email protected]
Subject: Re: [mems-talk] Negative Photoresist
Reply-To: [email protected]

Hi Peng,
The best is BCB by DowCorning.
I also know PDMS by Wackerchemie or Gelest but it's quite difficult to
obtain.
Bye

Peng Jin a icrit :

> Hi, friends,
>
> In my research project, I need to find a kind of negative photoresist
which
> must be easy to remove by acetone or other chemical solvent. Could
anyone
give
> me some idea about it?
>
> Thanks.
>
> Peng Jin
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/

--
*********************************************************
Dr. Paolo Bondavalli
R&D Engineer
LABCOM - Laboratoire Interconnexions Optiques et MEMS
THALES (ex THOMSON-CSF) CORPORATE RESEARCH CENTER
Domaine de Corbeville,
Route Departementale 128
F91404 ORSAY
(FRANCE)
Tel : 01 69 33 08 63
Fax : 01 69 33 08 62
Email : [email protected]
**********************************************************
Disclaimer: Opinions expressed herein are my own and may
  not represent those of my employer.
**********************************************************


--__--__--

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