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MEMSnet Home: MEMS-Talk: PZT thick layer deposition by sol-gel process
PZT thick layer deposition by sol-gel process
2002-01-30
ashish singh
PZT thick layer deposition by sol-gel process
ashish singh
2002-01-30
Dear MEMS community,

I am trying to make a   PZT(Lead Zirconate Titanate) actuator and I want to
deposit a thick layer of PZT on Silicon. I am looking for an easy and simply
process and I believe the sol-gel method can be a good solution.

I seek your suggestions for a good method of the sol-gel process. Any
recommendations for an alternate process is also welcome.

Thanks
Ashish Singh

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