Hi All,
We are trying to etch silicon nitride for fabricating a piezoresistive
accelerometer in our lab.Can anyone suggest any wet silicon nitride
etchant for low temperature.Please send the detailed composition, etch
rate, temperature of use etc.Also kindly send the references,
published papers if you can.Thanking you in advance.

Kanishka Biswas
Senior Project Assistant
Microelectronics Centre
Dept. of Electronics & ECE
Indian Institute of Technology
Kharagpur-721 302, INDIA
Phone:91-3222-8-1479
Fax:91-3222-755303
e.mail:[email protected]