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MEMSnet Home: MEMS-Talk: Black wax removal
Black wax removal
2002-02-02
Roger Brennan
Black wax removal
Roger Brennan
2002-02-02
I want to use black wax (Apiezon W) to protect one side of a silicon wafer
during  70C KOH.  Since TCE seems to be frowned on these days, I'm thinking
about Hypersolve (a.k.a. n-propyl bromide of 1 bromopropane) as the black
wax remover.  Hopefully, I can then rinse in something like IPA and then go
to DI water.

Anybody out there have any experience in this area?

Thanks in advance.


Roger Brennan
Home:
1403 Forrestal Avenue
San Jose, CA 95110
(408)453-0711 (telephone)
(408)573-9407 (fax)
[email protected]

Work:
Endevco
355 N. Pastoria Ave.
Sunnyvale, CA 94085
408-739-3533 ext 204
[email protected]

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