I want to use black wax (Apiezon W) to protect one side of a silicon wafer
during 70C KOH. Since TCE seems to be frowned on these days, I'm thinking
about Hypersolve (a.k.a. n-propyl bromide of 1 bromopropane) as the black
wax remover. Hopefully, I can then rinse in something like IPA and then go
to DI water.
Anybody out there have any experience in this area?
Thanks in advance.
Roger Brennan
Home:
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