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MEMSnet Home: MEMS-Talk: LPCVD Polysilicon
LPCVD Polysilicon
2002-02-03
Rohit Srivastava
LPCVD Polysilicon
Rohit Srivastava
2002-02-03
Hi,
   Can someone tell me where I can have LPCVD
polysilicon deposited and doped on a 4" wafer in the
US?
Rohit
Institute for Micromanufacturing
Lousiana Tech University
Ruston, LA 71272
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