Hi Anwar,

  There are many uses in airplanes. For example in navigation systems,
instrumentation, displays, safety (structural integrity, air pressure ...),
control (active wings), security, in-flight entertainment etc. The same is
true for Micro/Nanosatellites (communication, microthrusters, functional
surfaces for temperature control, inspection modules etc.) All major
companies and research institutes in this field (Boeing, Lockheed, British
Aerospace, Goodrich, Northrop Grumman, TRW ...) work on MEMS but they
usually don't tell you much about it on their webpages. Check out the
webpage of The Aerospace Corporation (www.aero.org) and search for MEMS. You
can download some good articles and papers on this topic from the Digital
Micropropulsion Project page (www.design.caltech.edu/micropropulsion). Other
interesting pages are The Angstroem Space Technology Center
(www.astc.material.uu.se) and the NASA Jet Propulsion Lab
(mems.jpl.nasa.gov). There are also a few edited books on this subject
available. Try H. Helvajian, Microengineering Aerospace Systems, Amer Inst
of Aeronautics or ... H. Helvajian, Microengineering Technology for Space
Systems ... or H. Helvajian and E. Robinson, Micro- and Nanotechnology for
Space Systems, all published by Amer Inst of Aeronautics. Regards,

-- Werner