Dear MEMS experts,
May I know which gives better conformability in deposition, SiO2 or Si?
I am using it as a sacrificial layer between gold and nitride. Is there
any better choice to give best the conformability? Thanks a lot.
Best Regards. Sincerely Yours,
XueCheng JIN
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XueCheng JIN
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Phone: (415) 497-0724 (home) Address: 8G Barnes
Web: http://www-leland.stanford.edu/~xcjin Escondido Village
Email: [email protected] Stanford, CA 94305
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