A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Conformability of SiO2 and Si deposition
Conformability of SiO2 and Si deposition
1996-07-11
Xuecheng Jin
Conformability of SiO2 and Si deposition
Xuecheng Jin
1996-07-11
Dear MEMS experts,
        May I know which gives better conformability in deposition, SiO2 or Si?
I am using it as a sacrificial layer between gold and nitride. Is there
any better choice to give best the conformability? Thanks a lot.

Best Regards.                                            Sincerely Yours,
                                                         XueCheng JIN
============================================================================
                                XueCheng JIN
                               --------------
Phone:   (415) 497-0724 (home)                   Address: 8G Barnes
Web:     http://www-leland.stanford.edu/~xcjin            Escondido Village
Email:   [email protected]                        Stanford, CA 94305
============================================================================


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
MEMS Technology Review
University Wafer
The Branford Group