Dear MEMS colleagues,

Can someone tell me how I can have to etch the quartz disk that  is 1 mm
thick.
I tried with HF solution and Cr mask, but etching rate is slow.


Thanks a lot

Best regards,

Luciano

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Ing. Luciano Scaltrito
Dipartimento di Fisica
Politecnico di Torino
C.so Duca degli Abruzzi, 24
10129 Torino, Italy
tel +39 011 564.7305/564.4160
fax +39 011 564.7399
E-mail : scaltrito@polito.it
http://www.polito.it/centri/laborato/limadel/film/index.html
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