Try this

http://www.okmetic.com/uploads/SOI-brochure.pdf


Best regards,
Helge

                -----Original Message-----
                From:   Alok Paranjpye [mailto:alokp@engineering.ucsb.edu]
                Sent:   Monday, February 11, 2002 12:41 AM
                To:     mems-talk@memsnet.org
                Subject:        [mems-talk] Thick SOI wafers

                Hi Everyone,
                I'm looking for bonded SOI wafers with a thick (10um+) top
Si layer and 2-3
                um BOX layer. I haven't been able to find any vendor that
makes such thick
                Si layers. I'd be grateful for any leads on this, or if
somebody could tell
                me what is the thickest Si layer available out there.
                Thanks!!
                Alok Paranjpye
                Graduate Student Researcher
                Mechanical & Environmental Engg.
                University of California
                Santa Barbara 93016
                Ph:  805-893-5341
                Fax: 805-893-8651
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