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MEMSnet Home: MEMS-Talk: Thick SOI wafers
Thick SOI wafers
2002-02-11
Luesebrink Helge
2002-02-11
Lawlor, Chris
Thick SOI wafers
Lawlor, Chris
2002-02-11
Hi Alok,
We offer SOI wafers with thickness 2um - 100+ um.
Oxides 0.2-3um as standard.
Website is www.bco-technologies.com , we are now part of Analog Devices.
 You can contact me directly if you have any queries.
#######
Apologies to those with no interest in SOI, sorry for taking up email space
!

Chris..


-----Original Message-----
From: Alok Paranjpye [mailto:alokp@engineering.ucsb.edu]
Sent: 11 February 2002 05:41
To: mems-talk@memsnet.org
Subject: [mems-talk] Thick SOI wafers


Hi Everyone,
I'm looking for bonded SOI wafers with a thick (10um+) top Si layer and 2-3
um BOX layer. I haven't been able to find any vendor that makes such thick
Si layers. I'd be grateful for any leads on this, or if somebody could tell
me what is the thickest Si layer available out there.
Thanks!!
Alok Paranjpye
Graduate Student Researcher
Mechanical & Environmental Engg.
University of California
Santa Barbara 93016
Ph:  805-893-5341
Fax: 805-893-8651
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