You can use RIE to remove the BCB using a O2 and CF4 gas mixture.

Regards

Edwin

At 10:11 2002-02-11 -0500, you wrote:
>Message: 5
>From: "Renie M Duvall" 
>To: [email protected]
>Date: Fri, 8 Feb 2002 21:31:52 -0800
>Subject: [mems-talk] BCB Removal from Silicon
>Reply-To: [email protected]
>
>Is there anyone that knows a method or vendor that can remove BCB from
>silicon, "cyclotene" produced by Dow?  I understand that  the solvent
>mesitylene will work but do not know any vendor source or other method
>for removal.  --- Renie M Duvall--- [email protected]

dr. ir. Edwin W.H. Jager, CTO         phone: +46-13-131650
Micromuscle AB                            GSM:  +46-733-601490
Westmansgatan 29                        fax: +46-13-131653
582
16  Linkvping                             email:  [email protected]
Sweden                                         http://www.micromuscle.com