Hi everybody,

do you know of some references on "health and safety instructions" for
plasma processing? Those books on plasma processing which I know don't cover
this topic.
I would like to learn about the toxicity of the exhaust gases, equipment
contamination, etc.

If you have some guidelines, instructions, handbooks or papers, I'd really
appreciate if you'd post the citations here.

Thanks very much for your help in advance!

Regards, Burkhard