A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: SU-8 mems-talk digest
SU-8 mems-talk digest
2002-02-12
Avi.Laker@teccor.com
2002-02-13
JAMES.R.THORPE
SU-8 mems-talk digest
JAMES.R.THORPE
2002-02-13
Hi Avi,

I've done some measurements on SU8(10) films at 10MHz and 10 GHz for
RF applications [1]. I measured a dielectric constant of 4.5 @ 10
MHz, falling to 4.2 at 10 GHz. Electrical breakdown was noted at
1.1*10^5 V/m^-1. Of course, these results only relate to films
produced under particular processing conditions. Also, our films were
found to be quite lossy at RF....

[1] J.R.Thorpe, D.P.Steenson and R.E.Miles "High Frequency
Transmission Line using a Micromachined Polymer Dielectric" IEE
Electronics Letters, Vol 34 No 12 pp 1237-1238

Rgds..

Jim.
***********************************************
Dr Jim Thorpe
Research Fellow

Institute of Microwaves and Photonics
School of Electronic and Electrical Engineering
The University of Leeds
Leeds
LS2 9JT

United Kingdom

Tel: +44 (0)113 233 2049 (Office)
Tel: +44 (0)113 233 2084 (Lab)
Fax: +44 (0)113 244 9451
***********************************************

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
The Branford Group
Harrick Plasma, Inc.
MEMStaff Inc.