Sandra,

SPS in The Netherlands can supply heated, filtered and recirculating
Teflon baths, working very well both for TMAH an KOH Si etching.

Try their website:

http://www.sps-europe.com/

Good luck,

Knut

Knut Lian
Process Engineer
Wafer Fab Technology
SensoNor asa
PO Box 196, N-3192 Horten
Norway
http:\\www.sensonor.com
Tel: +47 33 03 50 68
Fax: +47 33 03 51 05

-----Original Message-----
From: Sandra Bermejo [mailto:sandra@eel.upc.es]
Sent: 13. februar 2002 12:40
To: mems-talk@memsnet.org
Subject: [mems-talk] TMAH etching

Hi,
?Does anybody know how to buy a cabin to make a TMAH etch?
Thanks in advance,
Sandra

--
*********************************************************
Sandra Bermejo Broto
Assistant Professor
Electronic Engineering Department
Semiconductor Devices Group (GDS)
UPC-Campus Nord, C5
C/Jordi Girona, 1-3
E-08034 Barcelona
SPAIN
Phone: + 34 93 401 68 78
Fax:   + 34 93 401 67 56
e-mail: sandra@eel.upc.es
*********************************************************
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