Hi
Does anybody know about the mechanical properties (Young's modulus, average
and gradient stress, and ultimate strength, ...) of a heavily boron doped
silicon film(t : 2-4 um) and some references about it?

Best regards,

Ok-Chan, Jeong




Ok-Chan, Jeong
School of Electronics Engineering
5 Wonchon-Dong, Paldal-Ku
Suwon-City,442-749, KOREA
Tel : +82-31-219-2488
Fax : +82-31-212-9531
PCS : 016-208-1288
http://www.ajou.ac.kr/~mems


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