Renie,

A plasma etch CF4 O2 will do the trix -
I been told Xylene works but it seems to take a long time
Also, Hot Sulfric and Peroxide 75 to 25 will do the trix in a short
amount
Greg Miller
KVH Industries

-----Original Message-----
From: Renie M Duvall [mailto:[email protected]]
Sent: Friday, February 08, 2002 11:32 PM
To: [email protected]
Subject: [mems-talk] BCB Removal from Silicon


Is there anyone that knows a method or vendor that can remove BCB from
silicon, "cyclotene" produced by Dow?  I understand that  the solvent
mesitylene will work but do not know any vendor source or other method
for removal.  --- Renie M Duvall--- [email protected]
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