Dear members,
I am working with ssuprem4 for simulating a Si-pressure sensor process as we
intend to start a production. I wonder if any body knows if there are problems
with the resistivity tables (resistivity vs. impurity concentration) of B and P
in Silicon. In the old version, ssuprem3, there is a discepancy of up to
50%(!)between the tables of ssuprem3 and ASTM-standard F 723-88 (reapproved
1995).
In the case of ssuprem4 the resistivity tables are difficult to access. So I
wonder if anybody has ever investigated this?.
Best regards,


Mounir Ennabli, M. Sc. E. E.
Development Engineer
Grundfos Semiconductor
Direct: +45 44 34 71 58
Fax: +45 44 34 71 72
e-mail: [email protected]

Grundfos a/s
BE>THINK>INNOVATE
mailing address: Ryttermarken 15-21, 3520 Farum
Denmark