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MEMSnet Home: MEMS-Talk: Ta Etch
Ta Etch
1996-07-16
Carl Sullivan
Ta Etch
Carl Sullivan
1996-07-16
Hello,

Can anyone suggest a good "grain boundary etchant" for Tantalum?  Does anyone
have any experience with etching Ta to expose the grain boundaries?  Sorry in
advance if this is a trivial question.
Thanks
Carl


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