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News	MEMSnet Home: MEMS-Talk: Is there a way to align two sides of wafer Is there a way to align two sides of wafer 2002-02-19 Martin O. Patton 2002-02-19 StéphaneDURAND 2002-02-20 Vikas Gupta 2002-02-19 Eric Johnson 2002-02-19 Charles Ellis 2002-02-20 shay kaplan 2002-02-19 Kirsch Dave 2002-02-19 Luesebrink Helge 2002-02-19 Frank DiPiazza 2002-02-19 [email protected] 2002-02-19 BERAUER,FRANK (HP-Singapore,ex7) Is there a way to align two sides of wafer Frank DiPiazza 2002-02-19 Hi Marty, The easiest way to accomplish this task using your single side aligner: have a foundry pattern an alignment mark on both sides of your wafers and send them back to you. You are now ready to process each side individually. -----Original Message----- From: Martin O. Patton [mailto:[email protected]] Sent: Tuesday, February 19, 2002 9:33 AM To: [email protected] Subject: [mems-talk] Is there a way to align two sides of wafer Dear Mems group, I have a single side mask aligner. Is there a method by which this aligner can be used to align features on both sides of the wafer? Thanks for your assistance. Marty Martin O. Patton Senior Research Engineer Essential Research Incorporated 6410 Eastland Road Cleveland, Ohio 44142 www.er.com (440) 816-9850 _______________________________________________ [email protected] mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/ reply
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