In a similar yet different vain- anyone have a idea or source that can
'gouge' a 77mm hole 600um deep into a 1000um 150mm Silicon Wafer. I
know that I can fabricate SOI style bonded wafers with one wafer with a
tru-cut, but this is expensive.
Any contacts or ideas let me know.
Regards,
Ken Smith
Kmbh Associates
4968 Charter Road
Rocklin, CA 95765 U S A
510-714-5055 Efax- 510 217 4421 or 561 658 6136
High Purity Float Zone and Specialty CZ Silicon for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.
Quartz, Glass, Pyrex and Borofloat Wafer Supply. Anodic Bonding. SOG, SOS.
Michael D Martin wrote:
> One way to do this is to send your samples to a laser job shop. You can
> use 193 nm excimers to machine glass nicely. One company is JPSA Laser
> in New Hapshire, 603-595-7048
>
> -Mike
>
>
>>>>[email protected] 02/19/02 09:26AM >>>
>>>>
> I need to drill diameter 100um in thick glass wafer(thickness is from
> 1mm to
> 3mm). would you like to help me to figure out some way or which company
> can
> do that?
>
> thanks for your any information
>
> Dlee
> Research Asistant
> Mechanical Engineering Department
> University of Texas At Austin, TX
>
> _________________________________________________________________
> MSN Photos is the easiest way to share and print your photos:
> http://photos.msn.com/support/worldwide.aspx
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/
>
>
--
