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MEMSnet Home: MEMS-Talk: Young's modulus of SiO2 and silicon nitride
Young's modulus of SiO2 and silicon nitride
1996-07-17
Michael S. C. Lu
Young's modulus of SiO2 and silicon nitride
Michael S. C. Lu
1996-07-17
Hi,

I'd like to inquire if anyone knows the Young's modulus for Silicon
dioxide and silicon nitride thin films.

Thanks.

-Michael Lu


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