Hi Manoj,
Isn't that the wrong question? You need to tell us what you plan to make and
ask if you will need DRIE for that product. To ask what can't be made with
wet etch alone is impossible to answer.
Good luck with your MEMS fab!
Frank
-----Original Message-----
From: Manoj Wadhwa [mailto:[email protected]]
Sent: Thursday, February 21, 2002 2:24 AM
To: [email protected]
Subject: [mems-talk] drie v/s wet etch
Hi,
We are setting up a MEMS fabrication line in our company - Semiconductor
complex ltd, india. We need to know what specific products are there in MEMS,
which cannot be fabricated by wet etching. Basically we want to know if we
will require DRIE or vapour phase etching for any of the products.
Thanks
MAnoj Wadhwa
Manager- VLSI
SCL - INdia
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