A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: STS 310PC PECVD System
STS 310PC PECVD System
2002-02-25
Michael D Martin
STS 310PC PECVD System
Michael D Martin
2002-02-25
Hello,
    I am looking for someone who has some experience running the old
DOS software that controlls a decade old STS 310PC. I am in the process
of bringing one of these up, but am having problems with the setup.exe
program for making a new process. I will be contacting STS, but was
hoping I might find someone here with some hands on experience.

-Thanks,
    Mike Martin
    U of Louisville

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Tanner EDA by Mentor Graphics
MEMStaff Inc.
Nano-Master, Inc.