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MEMSnet Home: MEMS-Talk: RIE Cr etch
RIE Cr etch
2002-02-25
Gang Zhang
2002-02-25
[email protected]
RIE Cr etch
[email protected]
2002-02-25
Cl2 + O2 at around 500 watts should do the trick. It will produce anisotropic
profiles as well. Bob Henderson

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