Ultrasonic Machining would provide excellent results at this size.  Please
feel free to contact me or visit our WEB site at www.bullen-ultrasonics.com.

Mary Bullen
Bullen Ultrasonics, Inc.
(937)456-7545
Eaton, OH  USA

-----Original Message-----
From:   [email protected] [mailto:[email protected]] On
Behalf Of Roger Brennan
Sent:   Saturday, February 23, 2002 8:06 AM
To:     '[email protected]'
Subject:        [mems-talk] Drilling through holes

Hi everybody!

I'm now wet etching to make through holes in 12 mil (305 microns) <100> Si.
 The desired hole size is about 10 mils by 30 mils  (254 microns by 762
microns).

Is laser or physical drilling a possible alternative?

How about deep RIE?

Thanks.


Roger Brennan
Home:
1403 Forrestal Avenue
San Jose, CA 95110
(408)453-0711 (telephone)
(408)573-9407 (fax)
[email protected]

Work:
Endevco
355 N. Pastoria Ave.
Sunnyvale, CA 94085
408-739-3533 ext 204
[email protected]
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