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MEMSnet Home: MEMS-Talk: How to avoid SiNx crack on plated Au?
How to avoid SiNx crack on plated Au?
2002-02-26
PARK,CHUL (A-SanJose,ex1)
2002-02-26
Nephi Harvey
How to avoid SiNx crack on plated Au?
PARK,CHUL (A-SanJose,ex1)
2002-02-26
Hi
has anyone encountered a problem of SiNx crack when SiNx is covering plated
Au?
Do you know how to avoid this problem? I assume the adhesion between SiNx
and plated Au is not good in our case but it may be something else. Does
anyone know why it happens?

Thanks
Chul Park
Agilent technology

reply
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