A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: TEOS etch rate in KOH?
TEOS etch rate in KOH?
2002-02-27
Vladimir Kutchoukov
TEOS etch rate in KOH?
Vladimir Kutchoukov
2002-02-27
Dear MEMS members,

I am looking to find what the etching rate of LPCVD TEOS in KOH 33wt% is.

Thank you, in advance,
Vladimir

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Addison Engineering
Mentor Graphics Corporation
MEMS Technology Review