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MEMSnet Home: MEMS-Talk: looking for SOI wafers with thick Oxide layer
looking for SOI wafers with thick Oxide layer
2002-02-27
Oberhammer Joachim
2002-02-27
Lawlor, Chris
looking for SOI wafers with thick Oxide layer
Oberhammer Joachim
2002-02-27
I'm looking for supplier of SOI wafers fulfilling the following
(major) specifications:
- 100 mm diameter
- oxide layer thickness > 2.5 um (preferred up to 4 um)
- Si top layer 8-20 um thick (preferred: 10 um)
- low volume: about 5 pieces

If you have such wafers on the stock and would like to get rid of
them, or you know any supplier, please come back to me. Thanks.
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Joachim Oberhammer, Dipl.-Ing.

Royal Institute of Technology (KTH)   Phone:    +46/(0)8 790 6250
Dep. of Signals, Sensors and Systems  Fax:      +46/(0)8 10 0858
Microsystem Technology (MST)          Mobile:   +46/(0)70 692 1858
                                       e-mail:   [email protected]
Osquldas vdg 10                       homepage: http://www.s3.kth.se/mst/
SE-100 44 Stockholm, Sweden

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