MEMS-talk

News	MEMSnet Home: MEMS-Talk: references on reactive ion etching of siloxane based SOG microphone testing 2002-02-27 Kyu Tae Yoo 2002-03-11 Wieslaw Bicz 2002-02-27 Michael Pedersen references on reactive ion etching of siloxane based SOG 2002-02-27 W. Wang 2002-02-27 Babu(Panduga) references on reactive ion etching of siloxane based SOG W. Wang 2002-02-27 hi, does anybody have any information on etching of siloxane based SOG in parallel plate type reactor using CHF3 gas? -weichih reply
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