I'd like to get some 3", N(100), resistivity>5 Ohm-cm, 200um thick wafers.
Does anybody know where I can get them? Besides, I want to etch polyimide
film the wafer, does anybody know the etchant for the polyimde wet etching?
Any reply will be appreciated. Thanks in advance,
Best regards,
Lin
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Lin Wang, Graduate Student
Department of Electrical and Computer Engineering
Beckman Institute, Rm B428C
University of Illinois at Urbana-Champaign
405 North Mathews Avenue
Urbana, IL 61801
e-mail: [email protected], [email protected]
Tel. (217)-333-1088(O), (217)-351-8976(R)
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