Hi Amanpreet,

This should be a good reference and an appropritate
starting point

Williams, K.R.; Muller, R.S. Etch rates for
micromachining processing. Journal of
Microelectromechanical Systems, vol.5, (no.4), IEEE,
Dec. 1996. p.256-69.

hope that helps,

Abhinav

--- Amanpreet  wrote:
> Hello
>
> I am looking for the etch rates for all the
> processes and all the etchants
> particularly with the anisotropic etchants and deep
> reactive ion etching. If
> any one can give me information about this it will
> be of great help. thanks
> for reading and your help
>
> Amanpreet Singh
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