Hi Dr N Balasubramanian,

All front end operations need a clean room as well as some back end. A clean
roon is designed to minimize particles and contamination from contacting the
wafers and devices. One could also use a controlled environment which is an
area with no raised floors and HEPA filters as well as clean room suits to
minimize contamination. This is less costly than a true clean room an is being
used in the manufacturing of biological chips. The class of clean room
required is dependant on the CD (critical dimension) of your devices. SEMI has
information of classes of cleanrooms at thier site SEMI.org.

Sincerely,
Walter Stonas
Process Development Engineer


-----Original Message-----
From: N.Balasubramanian [mailto:[email protected]]
Sent: Monday, March 04, 2002 9:26 AM
To: [email protected]
Subject: [mems-talk] clean room


can you please tell me wmich MEMS operations require a clean room and which
do
not and why.
For example do you need a clean room to do microstereolithography
Thank you
Balu
Dr N Balasubramanian (india)
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