i have got silicon <100> wafers with EPI layer of Ar.
I want to etch through the silicon wafer to make some
windows but EPI works as etch stop(i think).  How can
I etch EPI layer with wet etchant like TMAH.  If i
keep on etching the wafer, EPI layer etches very
slowly but my mask ( SiO2 ) etches rapidly as compared
to EPI layer.  Is there any body to help, Please.

Thanks

M. Aslam
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