A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Plasm-therm RIE temperature
Plasm-therm RIE temperature
2002-03-03
Devarajan Balaraman
2002-03-04
kirt_williams@agilent.com
2002-03-05
BobHendu@aol.com
Plasm-therm RIE temperature
BobHendu@aol.com
2002-03-05
Depending on the amount of time that the substrate is in the plasma it could
reach temperatures of >125 degrees C. Bob Henderson

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
The Branford Group
MEMStaff Inc.
MEMS Technology Review