Greetings -

We are looking for a wet etch to round or smooth the knife edges
formed at the bottom edges of KOH etched through-holes in silicon.
Something that preferentially attacks sharp points would be
preferable. Plasma/RIE etches involving CF4, SF6, CHF3, O2 are also
possible.

Any hints would be appreciated.

Jim

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  - Jim Beall 303-497-5989
    [email protected]