You might want to try AZ MIF 327 Photoresist developer - you might stand
a better chance of etching your Al film - its very slow but works quite
well.

Greg Miller
KVH

-----Original Message-----
From: Hoyin [mailto:[email protected]]
Sent: Monday, March 04, 2002 9:38 AM
To: [email protected]
Subject: [mems-talk] Problem in etching Al and Pt


 Hi all,

     I have got a simple question.   I want to sacrifically release my =
 device by etching Al. However, one of the layer is Pt. Will the Al =
 etchant etch Pt  ???  What etchant do you suggest??

 Thank you very much!!!

 Hoyin
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.mems-exchange.org/