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News	MEMSnet Home: MEMS-Talk: how to etch SiO2 with RIE how to etch SiO2 with RIE 2002-03-06 Peng Yao 2002-03-07 Roger Shile 2002-03-07 [email protected] 2002-03-08 Stefan Wiechmann 2002-03-14 Ravi Shankar 2002-03-07 Peng Yao 2002-03-08 [email protected] 2002-03-08 [email protected] how to etch SiO2 with RIE Roger Shile 2002-03-07 Most any fluorine based chemistry should work, CF4, SF6, etc. If you want selectivity over underlying Si, use CHF3. Roger Shile >>> [email protected] 03/06/02 05:01PM >>> Hi all, I am looking for a way to etch SiO2 with my RIE. What kind of gas is necessary for this work. Thank you very much! leo DOEs lab Electrical Engineering Dept. Univeristy of delaware Newark D.E 19716 _______________________________________________ [email protected] mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/ reply
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