Hi,I can answer your first question about SU-8 exposure.First, you can check the
alinger's exposure intensity (in mW/cm2) from its manual. Then, according to the
graph of exposure dose vs. thickness which provided by Microchem, you can find
the specified exposure dose (in mJ/cm2), finally, expose time=exposure
dose/exposure intensity (in seconds). Note,the values of exposure dose are
measured on UV350~450nm.If you want to know more about the fabrication of SU-8,
I recommend a forum. The web address is
http://aveclafaux.freeservers.com/SU%2D8.htmlHope helpful.Yi ZhouMEMS
LabDepartment of Mechanical EngineeringUniversity of Maryland, College Park>
10. SU-8 exposure and parylene (anshu mehta)>Message: 10>Date: Thu, 7 Mar 2002
20:00:10 -0800 (PST)>>From: anshu mehta >To: [email protected]>Subject:
[mems-talk] SU-8 exposure and parylene>Reply-To: [email protected]>>Hi >I am
using Su-8 5 as a structural layer for my>device. I looked up Microchem website
and they give>the exposure in terms of mJ/cm2. Is it possible to>find a rough
estimate for exposure time on a>particular aligner using the mJ/cm2 data?
>Also, I wanted to know if it possible to pattern>parylene?   >Thanks,>Anshu
mehta.
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