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MEMSnet Home: MEMS-Talk: Wafer Drying
Wafer Drying
2002-03-11
Roger Brennan
2002-03-11
Bill Moffat
2002-03-11
[email protected]
2002-03-11
Mark West
Wafer Drying
Roger Brennan
2002-03-11
Hi Everybody:

I have an "Iso-dryer"  (a vapor "de-greaser" using isopropyl alcohol) ready
to be replaced.  It has been suggested that I replace it with a Marangoni
drier.  As I understand this system, a layer "atomized" mist of very small
liquid droplets of isopropyl hovers over the top of DI wafer.  As the
wafers move from the DI water to the iso, the wafers are supposed to be
dried.  So far, I have talked to the vendor, Avid Technology, Mountain
View, CA,  www.Itechcorp.com

Sounds like magic!  Is anyone out there using such a system and are you
happy with it?

Thanks,


Roger Brennan
Home:
1403 Forrestal Avenue
San Jose, CA 95110
(408)453-0711 (telephone)
(408)573-9407 (fax)
[email protected]

Work:
Endevco
355 N. Pastoria Ave.
Sunnyvale, CA 94085
408-739-3533 ext 204
[email protected]

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