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MEMSnet Home: MEMS-Talk: Rebuilding a Reactive Ion Etcher (RIE).
Rebuilding a Reactive Ion Etcher (RIE).
2002-03-11
Roger Brennan
2002-03-11
[email protected]
2002-03-11
Michael D Martin
Rebuilding a Reactive Ion Etcher (RIE).
Michael D Martin
2002-03-11
Strangely enough I've been working on reviving a Semi Group 1000TP and
have only recently gotten it running. While I'm no expert, I'd be happy
to help in any way I can.

Michael Martin
Microfabrication Scientist
U of Louisville
(502)852-1572



>>> [email protected] 03/11/02 06:28AM >>>
Hi,

I'm looking for somebody to overhaul an ancient model 1000MP?, The Semi
Group, Reactive Ion Etcher (RIE).

Any feed back will be appreciated.

Roger Brennan
Home:
1403 Forrestal Avenue
San Jose, CA 95110
(408)453-0711 (telephone)
(408)573-9407 (fax)
[email protected]

Work:
Endevco
355 N. Pastoria Ave.
Sunnyvale, CA 94085
408-739-3533 ext 204
[email protected]
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