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MEMSnet Home: MEMS-Talk: Thick micromachining for biochips
Thick micromachining for biochips
1996-02-07
Giovanni De Gasperis
Thick micromachining for biochips
Giovanni De Gasperis
1996-02-07
Hi,

surfing the MEMS web site, I found this interesting abstract:

Silicon Micromachined Devices for in Vivo and In Vitro Studies of Neural
Networks, Thesis by Svetlant Tatic-Lucicc, Doctor of Philosophy in Electrical
Engineering, California Institute of Technology

This the paragraph in which I'm most interested:

"... the novelty of these devices is a neuron well structure fabricated in a
16-20 um-thick silicon membrane using a double-sided micromachining
technique...."

I would appreciate any references, postscript files, bibliography on this
specific subject.

The bottom line is that I want to fabricate a very thick insulating layers on
top of microelectrodes, a very similar application to neural wells, but for a
different purpose.

Thank's in advance

Dr. Giovanni De Gasperis
Experimental Pathology, Box 89
U.T. M.D. Anderson Cancer Center
1515 Holcombe
Houston, TX 77030
Phone: (713)-792-7605
FAX: (713)-792-5940


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