Try contacting Norm Nystrom at NYS Enterprises (408)867-5668.  I beleive he
has done similar processing

Mac McReynolds
R&D Manager
Caliper Technologies Corp.
605 Fairchild Drive
Mountain View, CA 94043-2234
Tel:  650-623-0710
Fax:  650-623-0521

> ----------
> From:         Connie Kathleen Smith
> Reply To:     mems-talk@memsnet.org
> Sent:         Thursday, March 14, 2002 7:45 AM
> To:   mems-talk@memsnet.org
> Subject:      [mems-talk] Anodic Bonding of Si to Pyrex
>
> I need to bond Pyrex to both sides of a silicon wafer.  One of the pieces
> of Pyrex is a full 4 inch diameter wafer (same as Si wafer)  with a
> thickness of 0.5 inches.  This is used as the base for a flow cell etched
> into the wafer.  The other piece of Pyrex is a cover slip for microscopy
> work so it is only 0.13 mm in thickness and a 50mm square.
>
> Has anyone ever anodically bonded pyrex to both sides?  All the literature
> I read only describes the process for one side.
>
> Thank you,
> Connie Smith
> Department of Chemical Engineering
> Rice University
> 6100 Main MS 362
> Houston, TX 77005
> Phone 713-348-3507
> Fax 713-348-5478
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