Hello Connie,

You can bond the pyrex to both sides in one process. Contact positive
voltage to the silicon, and ground to the glass.
If you would like to more info, please call me, or you can check out
www.evgroup.com

Best Regards,
Josh Palensky
EV Group
(602) 437-9492


-----Original Message-----
From: Connie Kathleen Smith [mailto:[email protected]]
Sent: Thursday, March 14, 2002 8:46 AM
To: [email protected]
Subject: [mems-talk] Anodic Bonding of Si to Pyrex


I need to bond Pyrex to both sides of a silicon wafer.  One of the pieces
of Pyrex is a full 4 inch diameter wafer (same as Si wafer)  with a
thickness of 0.5 inches.  This is used as the base for a flow cell etched
into the wafer.  The other piece of Pyrex is a cover slip for microscopy
work so it is only 0.13 mm in thickness and a 50mm square.

Has anyone ever anodically bonded pyrex to both sides?  All the literature
I read only describes the process for one side.

Thank you,
Connie Smith
Department of Chemical Engineering
Rice University
6100 Main MS 362
Houston, TX 77005
Phone 713-348-3507
Fax 713-348-5478
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