PDMS as in similar to RTV?  Caltech's group by Dr. Y.C. Tai have done
quite some amount of work on patterning rubber.  Very very slow with RIE i
got to warn you.

adam


On Thu, 14 Mar 2002, Greg Miller wrote:

> Mems group,
>
> I was wondering if anyone has RIE pattern PDMS (Sylgard 184) material
> and if so could you tell me the parameters used.
>
> Thanks,
>
> Greg Miller
> KVH
> [email protected]
>
> [demime 0.98e removed an attachment of type application/ms-tnef which had a
name of winmail.dat]
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