Regarding the dry selective and isotropic etch for
III-V
Message: 2
Date: Wed, 13 Mar 2002 09:28:25 -0800 (PST)

Supposedly, you can add SF6 to a Cl2/BCl3 to cause the etch process to stop
on AlGaAs and etch only GaAs. I don't have much experience with this, but I
have read about it. I have not heard of anyone being able to etch AlGaAs
selectively over GaAs though.

We do have experience with non-selective etching of 3-5 material.

Mike Marrs
Process Engineer
Trion Technology
(480) 968-8818
[email protected]