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MEMSnet Home: MEMS-Talk: Thick Photoresist Materials/Applications
Thick Photoresist Materials/Applications
2002-03-14
BERAUER,FRANK (HP-Singapore,ex7)
2002-03-14
Andrew Kuchling
2002-03-15
JAMES.R.THORPE
2002-03-15
Blunier, Stefan
2002-03-16
Franck Alexis Chollet (Asst Prof)
Thick Photoresist Materials/Applications
JAMES.R.THORPE
2002-03-15
Frank

I use Shipley SJR5740 as a positive alternative to SU-8 for films up
to 80um thick and sometimes thicker :-). I've done some
characterisation of the processing - contact me directly if you want
more info.

Rgds

Jim.

***********************************************
Dr Jim Thorpe
Research Fellow

Institute of Microwaves and Photonics
School of Electronic and Electrical Engineering
The University of Leeds
Leeds
LS2 9JT

United Kingdom

Tel: +44 (0)113 233 2049 (Office)
Tel: +44 (0)113 233 2084 (Lab)
Fax: +44 (0)113 244 9451
***********************************************

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