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MEMSnet Home: MEMS-Talk: SU-8 spinning problems
SU-8 spinning problems
2002-03-15
Glen Landry
2002-03-15
BobHendu@aol.com
2002-03-15
CLIF HAMEL
2002-03-15
Vic Kley
2002-03-15
Henry Yang
2002-03-15
kirt_williams@agilent.com
wafer level vacuum packaging
2002-03-15
Krishna Kashyap
2002-03-15
CLIF HAMEL
SU-8 spinning problems
kirt_williams@agilent.com
2002-03-15
> "200 rpm per second" ? Cliff???
>
> 200 rpm means 200 revolutions per minute.  Are you suggesting an
> acceleration or is it just a mistake?

When you program a newer model of spinner,
you can set the acceleration in addition to the rotational speed.
For example, an MTI Flexifab take takes the acceleration in krpm/s.

        --Kirt Williams Agilent Technologies

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