Hi Frank,
we have played with AZ9620 from Clariant and it is OK for sure up to 50um.
I've read somewhere that it can reach 100um.
The problems we had was for spinning (we use multiple coating), and a thin
layer of residue left after developing (we RIE it off) - but most probably
these can be solved with more trials.
The resist is expensive though, but the profile you get are very good (i.e.,
'vertical') with a contact aligner and it is a positive chemistry (acetone
washable).
Franck (note the c :-)

"-----Original Message-----
"From: BERAUER,FRANK (HP-Singapore,ex7) [mailto:[email protected]]
"Sent: Thursday, 14 March, 2002 14:10
"To: '[email protected]'
"Subject: [mems-talk] Thick Photoresist Materials/Applications
"
"
"Dear Fellow MEMS Researchers,
"
"I am interested in thick (>10um) photoresist materials (other
"than SU-8) and applications. If you are working with those or
"know a good source of information, please let me know. Thanks!
"
"Greetings,
"       Frank Berauer
"       Senior R&D Engineer
"       Hewlett-Packard Singapore
"
"P.S.: I would like to express my gratitute to those who make
"       this discussions possible, sift through hundreds of
"       messages promptly and help to keep the group focused
"       and free of spam. (Is it you, Andrew M. Kuchling?)
"       It is a great job to all of us and I think you deserve
"       more than praise. If you ever come to my part of the
"       world, let me know and you're in for a Chinese seafood
"       treat (fellow MEMS researchers in Singapore are welcome
"       to join!).
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