A reference on wet etching crystalline quartz is:

"Etch rates of crystallographc planes in Z-cut quartz - experiments
and simulation," Pelle Rangsten, et al, J. Micromech. Microeng. *
(1998) pp. 1-6.

A paper on channel etching by reactive ion etching is:
"Planar quartz chips with submicron channels for 2-dimensional
capillary electrophoresis applications," H. Becker, et al, J.
Micromech. Microeng., 8, (1998) pp24-28.

>Hello,
>
>Can anyone give me some basic references on the micromachining of
>single crystalline quartz?  The closer to a tutorial on the materials
>and basic processing the better.
>
>Thanks very much,
>
>Gary H. Bernstein

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